KherveFitting

KherveFitting is a full featured XPS, XAS and Raman fitting software for Windows & macOS that is simple and easy to use. KherveFitting can open Excel files (.xlsx) or import/convert .vms, .avg, .kal, .spe (Thermo, Kratos, Specs, Scienta, Omicron, Phi) files into Excel format. 5 background types available: Tougaard, Shirley, Smart, Adaptive Smart. Various peak fitting models: Product and Sum of Gaussian and Lorentzian (GL & SGL), Voigt, Asymmetric Lorentzian (LA), Doniac-Sunjic (G*DS) and many more . Fit single peaks or doublets. Doublet splitting and RSF values are stored in a library file. Several intensity calibration available:TPP-2M, Scoffield, Wagner. Atomic concentration acurately calculated and matching with Thermo Avantage software.

YouTube Channel: https://www.youtube.com/@xpsexamples-imperialcolleg6571

Features

Convert Vamas (.VMS), Kratos (.kal), Phi (.spe), Thermo (.vgd, .xlsx, .avg) into Excel files
Background: Shirley, Smart, Adaptive Smart, U4-Tougaard
Change background offset with SHIFT+mouse
Peak shape: GL, SGL, LA, Voigt, Pseudo-Voigt, ExpGauss, Doniach-Sunjic
D-parameter Measurement
Sample/Experiment Manager
Open / Save Peak Library with lots of peak table to choose from
Intensity calibration: TPP-2M, Wagner, Scofield, EAL
Transmission function correction including NPL transmission function
Multiple RSF libraries available matching CasaXPS and Thermo Avantage
Angular Correction Factor
Automatic binding energy correction
High number of Constraints.
Add doublet available with doublet splitting library available in a txt file
Undo / Redo capabilities
Peaks can be locked to each other
Most part of the fit can be done by key shortcut rather than the mouse
Copy, rename, delete, crop, or join Core Levels
Smooth, derivate, integrate Core Levels
Survey Identifications and label
Source code available in GitHub
Fit asymmetric least square background to Raman data
GitHub page: https://github.com/KherveFitting/KherveFitting
Support XAS synchrotron files (more if requested)

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nawal1 Posted 2026-01-04

More than awesome! This is hands down the best XPS fitting software available. It features an exceptional library that makes fitting your data both easy and highly reliable. The software reflects the deep expertise and innovation of its creator, the genius Dr. Gwilherm Kerherve, and in my opinion sets a benchmark that others in the field simply cannot match. An absolute must have for anyone serious about high-quality XPS analysis. I sincerely thank him for the extraordinary effort behind this software.
mingxu0906 Edited 2025-06-02

Amazing software for XPS and Raman fitting, easy input and output, suitable for beginner.
lyh8612098 Posted 2025-06-02

fantastic software！it works for XPS and Raman. Easy to use!
sw1120 Posted 2025-03-19

Great XPS fitting software that I wish I had it much earlier than now as a Mac user
wskinner1701 Posted 2025-03-16

Fantastic free software for XPS analysis. It's beginner-friendly, intuitive, full of useful features and can import data from most commonly-used XPS instruments - and best of all (for me at least) it now runs on MacOS!