About: Surface micromachining

An Entity of Type: Thing, from Named Graph: http://dbpedia.org, within Data Space: dbpedia.org

unknown

Property	Value
dbo:wikiPageWikiLink	dbr:Substrate_(materials_science) dbr:Silicon dbr:Polymer dbr:Plasma_(physics) dbr:Glass dbr:Acid dbr:Cantilever dbr:Plastic dbr:Integrated_circuit dbr:Silicon_dioxide dbr:MEMS dbr:Semiconductor_device_fabrication dbr:Ion dbr:Wafer_(electronics) dbr:Polyethylene_terephthalate dbr:Magnetic_nanoparticles dbr:Nanoparticle_deposition dbr:Microstructure dbr:Nanoelectromechanical_relay dbc:Microtechnology dbr:Accelerometer dbr:Array dbr:Bulk_micromachining dbr:Thin-film_transistor dbc:Microelectronic_and_microelectromechanical_systems dbc:Nanotechnology dbr:Polysilicon dbr:Thin_film_solar_cell dbr:Photo-lithography dbr:Ionized_gas dbr:Silicon_Wafer
dbp:wikiPageUsesTemplate	dbt:More_footnotes dbt:Reflist
dct:subject	dbc:Microtechnology dbc:Microelectronic_and_microelectromechanical_systems dbc:Nanotechnology
rdfs:label	Surface micromachining (en)
owl:sameAs	freebase:Surface micromachining wikidata:Surface micromachining dbpedia-fa:Surface micromachining dbpedia-global:Surface micromachining
prov:wasDerivedFrom	wikipedia-en:Surface_micromachining?oldid=1231225296&ns=0
foaf:isPrimaryTopicOf	wikipedia-en:Surface_micromachining
is dbo:product of	dbr:Electro_Scientific_Industries
is dbo:wikiPageDisambiguates of	dbr:Micromachining
is dbo:wikiPageWikiLink of	dbr:Thermal_scanning_probe_lithography dbr:Outline_of_nanotechnology dbr:Kurt_Petersen_(inventor) dbr:Microscanner dbr:Microcontact_printing dbr:Comb_drive dbr:Polaritonics dbr:Protein_adsorption dbr:Micromachinery dbr:Electro_Scientific_Industries dbr:Susan_D._Allen dbr:Millipede_memory dbr:Capacitive_micromachined_ultrasonic_transducer dbr:Probe_tip dbr:Biomachining dbr:Centrifugal_micro-fluidic_biochip dbr:Holo/Or dbr:Nanoelectromechanical_relay dbr:Argon_fluoride_laser dbr:Bulk_micromachining dbr:Dense_plasma_focus dbr:Richard_S._Muller dbr:Micromachining dbr:Piezoelectric_microelectromechanical_systems dbr:Microelectromechanical_systems dbr:Thermochemical_nanolithography
is foaf:primaryTopic of	wikipedia-en:Surface_micromachining